주식회사 한울이엔지
(주)한울이엔지는 초고진공 시스템 설계 능력과 우수한 제작 기술을 기반으로
국내외 연구소 및 기업체에 관련 서비스를 제공 하고 있습니다.
Prodcut
입자가속기 & 초고진공 부품
Slit System
Wire Monitor
Graphite Filter
Photon Shutter Assy
BM Screen Monitor
Rotary Filter System
In Vacuum Undulator & RF Module Ass’y
Hard X-ray Bendable Mirror Manipulator
[Figure. 1-1]
Hard X-ray Bendable Mirror Manipulator
(outside)
[Figure. 1-2]
Hard X-ray Bendable Mirror Manipulator
(Inside)
Motion | Parameter | Specification |
---|---|---|
Horizontal Axis (x-axis) | Driver | Horizontal actualor(UHV) |
Range | ±20mm | |
Resolution | 0.02㎛ (motor) / 0.10㎛ (encoder) | |
Precision | 0.2㎛ (linear encoder) | |
Drive type | 5P Harmonic Step Moter, PMM3.3A-HG 100, 0.35A | |
Vertical Axis (z-axis) | Driver | Vertical Actuator |
Range(±) | ±25mm | |
Resolution | 0.05㎛ (motor) / 0.10㎛ (encoder) | |
precision | 0.2㎛ (linear encoder) | |
Drive type | 5P Harmonic Step Motor, PK543BW-H100 , 0.75A | |
Roll | Driver | Vertical Actuator |
Range | ±2.60° (±45.45mrad) | |
*axis distance = 220mm | Resolution | 0.094arcsec (0.455μrad) (encoder) |
Precision | 0.375arcsec (1.818μrad) (encoder) | |
Drive type | 5P Harmonic Step Motor, PK543BW-H100 , 0.75A | |
Pitch | Driver | Vertical Actuator |
Range | ±2.68° (±46.73mrad) | |
*axis distance = 1070mm | Resolution | 0.019arcsec (0.093μrad) (encoder) |
Precision | 0.077arcsec (0.374μrad) (encoder) | |
Drive type | 5P Harmonic Step Motor, PK543BW-H100 , 0.75A | |
Yaw | Driver | Horizontal actuator(UHV) |
Range | ±2.14° (±37.38mrad) | |
*axis distance = 1070mm | Resolution | 0.008arcsec (0.037μrad) (encoder) |
Precision | 0.077arcsec (0.374μrad) (encoder) | |
Drive type | 5P Harmonic Step Motor, PMM3.3A-HG 100 , 0.35A | |
Mirror Bender Actustor | Driver | Bender Actuator |
Range | 12mm (100kgf) | |
Resolution | 0.02㎛ | |
Precision | 0.1kgf (by force sensor) | |
Drive type | 5P Harmonic Step Motor | |
Base Alignment Sysem | Driver | Manual adjustment (manual adjustment) |
Range | Z direction ±25mm (with roll, pitch) | |
x, y, z direction, ±15mm | ||
UHV Alignment System | Range | X & Y : ± 1 deg |
Resolution | 0.0001 deg | |
mirror dirnerision (LxWxH) (mm) | 1000 x 90 x 55 | |
Effective area (LxW) (mm) | 900 x 70 | |
Vacuum chamver dimension (mm) | 1630 x 470 x 445 | |
Mirror Center Height(mm) | 1400 | |
Cooling method | Water cooling | |
Vacuum degree(mbar) | less than 2x10E-9 / max 1 10°C baking | |
Reflective Direcion | Upward | |
Incidence angle (mrad)&(typical angle) | 2 | |
Tangential siope error (μrad) | less than 1.0 | |
Tangential radius (km) & (typical R) | 4.294 (2.5 ~ 10.0km,) | |
Footprin at mirror potition (with) | Max 10mm | |
Substrate Material & Coating | Si PVRh |
Bendable KB Mirror Manipulator
Bendable KB Mirror Manipulator
(outside)
Bendable KB Mirror Manipulator
(Inside)
Axis(7) / spec. | Moter resolution | Encoder resolution | precision | Range |
---|---|---|---|---|
Pitch axis (UHV Actuator) | ≤ 0.05 (0.25 μrad) | ≤ 0.1 (0.485 μrad) | ≤ 0.2 (0.97 μrad) | ≥ ± 1.5 deg. |
Roll axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.2 (0.970 μrad) | ≤ 0.5 (2.42 μrad) | ≥ ± 1.5 deg. |
Yaw axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.1 (0.97 μrad) | ≤ 0.5 (2.424 μrad) | ≥ ± 1.5 deg. |
X axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.2 ㎛ | ≥ ± 10.0 mm |
Y axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.2 ㎛ | ≥ ± 10.0 mm |
Z axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.2 ㎛ | ≥ ± 10.0 mm |
Bender axis (UHV Actuator) | ≤ 0.05 ㎛ | 0.1 kgh (Force sensor) | 0.2 kgf | ≥ 12.0 mm |
Axis(6) / spec. | Moter resolution | Encoder resolution | precision | Range |
---|---|---|---|---|
Pitch axis (UHV Actuator) | ≤ 0.05 (0.25 μrad) | ≤ 0.1 (0.485 μrad) | ≤ 0.2 (0.97 μrad) | ≥ ± 1.5 deg. |
Roll axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.2 (0.970 μrad) | ≤ 0.5 (2.42 μrad) | ≥ ± 1.5 deg. |
Yaw axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.1 (0.97 μrad) | ≤ 0.5 (2.424 μrad) | ≥ ± 1.5 deg. |
X axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.5 ㎛ | ≥ ± 10.0 mm |
Y axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.5 ㎛ | ≥ ± 10.0 mm |
Bender axis (UHV Actuator) | ≤ 0.05 ㎛ | 0.1 kgh (Force sensor) | 0.2 kgf | ≥ 12.0 mm |
Fixed KB Mirror Manipulator
Fixed KB Mirror Manipulator
(outside)
Fixed KB Mirror Manipulator
(inside)
Fixed KB Mirror Manipulator coordinate
Axis(6) / spec. | Moter resolution | Encoder resolution | precision | Range |
---|---|---|---|---|
Pitch axis (UHV Actuator) | ≤ 0.05 (0.25 μrad) | ≤ 0.1 (0.485 μrad) | 0.2 (0.97 μrad) | ≥ ± 1.5 deg. |
Roll axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.2 (0.970 μrad) | 0.5 (2.42 μrad) | ≥ ± 1.5 deg. |
Yaw axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.1 (0.97 μrad) | 0.5 (2.424 μrad) | ≥ ± 1.5 deg. |
X axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.2 ㎛ | ≥ ± 10.0 mm |
Y axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.2 ㎛ | ≥ ± 10.0 mm |
Z axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.2 ㎛ | ≥ ± 10.0 mm |
Axis(5) / spec. | Moter resolution | Encoder resolution | precision | Range |
---|---|---|---|---|
Pitch axis (UHV Actuator) | ≤ 0.05 (0.25 μrad) | ≤ 0.1 (0.485 μrad) | 0.2 (0.97 μrad) | ≥ ± 1.5 deg. |
Roll axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.2 (0.970 μrad) | 0.5 (2.42 μrad) | ≥ ± 1.5 deg. |
Yaw axis (UHV Actuator) | ≤ 0.1 (0.485 μrad) | ≤ 0.1 (0.97 μrad) | 0.5 (2.424 μrad) | ≥ ± 1.5 deg. |
X axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.5 ㎛ | ≥ ± 10.0 mm |
Y axis (UHV Actuator) | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 0.5 ㎛ | ≥ ± 10.0 mm |
Mirror Manipulator/PGM System (Plane Grating Monochromator)
Fixed KB Mirror Manipulator
(outside)
Fixed KB Mirror Manipulator
(inside)
Fixed KB Mirror Manipulator coordinate
[Table. 4-1] PGM System Grating Motion Specifications
Axis / spec. | Moter resolution | Encoder resolution | precision | Range |
---|---|---|---|---|
Scan motor | ≤ 0.02 μrad | ≤ 0.03 μrad | 0.25 μrad | 0.5 ~ 4.0 deg. |
Pitch align motor | ≤ 0.5 μrad | ≤ 0.25 μrad | 2.5 μrad | ± 1.5 deg. |
Roll align motor | ≤ 0.4 μrad | ≤ 0.25 μrad | 2.5 μrad | ± 1.5 deg. |
Y align motor | ≤ 0.02 ㎛ | ≤ 0.1 ㎛ | 1.0 ㎛ μ | ± 9.0 mm |
[Table. 4-2] PGM System Pre-Mirror Motion Specifications
Axis / spec. | Moter resolution | Encoder resolution | precision | Range |
---|---|---|---|---|
Scan motor | ≤ 0.02 μrad | ≤ 0.03 μrad | 0.25 μrad | 0.5 ~ 4.0 deg. |
Pitch align motor | ≤ 0.5 μrad | ≤ 0.25 μrad | 2.5 μrad | ± 1.5 deg. |
Roll align motor | ≤ 0.4 μrad | ≤ 0.25 μrad | 2.5 μrad | ± 1.5 deg. |
Y align motor | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | 1.0 ㎛ μ | ± 9.0 mm |
[Table. 4-3] PGM System Other Motion Specifications
Axis / spec. | Moter resolution | Encoder resolution | precision | Range |
---|---|---|---|---|
X axis motor | ≤ 0.1 ㎛ | ≤ 0.2 ㎛ | 1.0 ㎛ | ± 35 mm |
Z axis motor | ≤ 0.1 ㎛ | ≤ 0.2 ㎛ | 1.0 ㎛ | ± 7.0 mm |
SPEM Chamber & Stage & Actuator
◆ Motion Axis
Motor resolution | Encoder resolution | Precision | Range | Remark | |
---|---|---|---|---|---|
X axis | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | ≤ 0.5 ㎛ | ≥ ± 15.0 mm | UHV Actuator |
Y axis | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | ≤ 0.5 ㎛ | ≥ ± 15.0 mm | UHV Actuator |
Z axis | ≤ 0.05 ㎛ | ≤ 0.1 ㎛ | ≤ 0.5 ㎛ | ≥ ± 15.0 mm | UHV Actuator |
In-vacuum actuator
/ARCUS Controller,
3Ch 2ph Step Motor Controller,
3Ch 5ph Step Motor controller
-UHV compatible design
-Ultimate pressure Less than 5×10-10 Torr
-PZT Stage used. (P-561)
-Micro channel plate (Air Cylinder type , Beam By-pass mode)
ELECTRON GUN
[제작 실적품]
구분 | Single bunch mode | Multi-bunch mode |
---|---|---|
Beam energy | 100 keV | 100 keV |
Charge | 0.01~2.5 nC | 3~5 nC |
Pluse length | ≤1 ns | 100~400 ns |
Repetition rate | 2 Hz | 2 Hz |