주식회사 한울이엔지
(주)한울이엔지는 초고진공 시스템 설계 능력과 우수한 제작 기술을 기반으로
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PRODUCT
자성유체씰(표준타입)
MODEL CODE
Ex) HMS-H-F-020-N-S-U01
적용 자성유체 타입
– 부식성 강한 활성 가스대응
| Item | Magnetization (Gauss) |
Viscosity (mPa.sec) |
Vapor Pressure (Pa at 20℃) |
Torr (mmHg) |
Specific Gravity (at 20℃) |
|---|---|---|---|---|---|
| THY-1 | 450 | 12,000 | 5*10-14 | 3.7*10-16 | 2.2 |
| MFF-02 | 400 | 2,800 | 2*10-9 | 1.5*10-11 | 2.17 |
| MFF-03 | 550 | 6,200 | 2*10-9 | 1.5*10-11 | 2.27 |
– 비활성 가스 대응
| Item | Magnetization (Gauss) |
Viscosity (mPa.sec) |
Vapor Pressure (Pa at 20℃) |
Torr (mmHg) |
Specific Gravity (at 20℃) |
|---|---|---|---|---|---|
| MFA-10 | 850 | 2,900 | 4*10-8 | 3*10-10 | 1.68 |
| MFA-08 | 780 | 800 | 4*10-8 | 3*10-10 | 1.52 |
| MFA-06 | 580 | 300 | 1*10-7 | 7.5*10-10 | 1.36 |
| MFA-04 | 470 | 240 | 1*10-7 | 7.5*10-10 | 1.31 |
| MFA-02 | 400 | 160 | 1*10-7 | 7.5*10-10 | 1.23 |
– Through Hole Mount Feedthroughs
| Shaft Diameter | 012 | 020 |
|---|---|---|
| A | 12(−0.027) | 20(−0.033) |
| B | 179 | 211 |
| C | 109 | 121 |
| D | M25x1.5 | M30x1.5 |
| E | 4Wx2.5Dpx20Lg(Flat | 6Wx3.5Dpx25Lg |
| F | 40 | 55 |
| J | 48 | 63 |
| K | 74 | 82 |
| L | 36.5 | 40.5 |
| Model Number | HMS-S-S-012-NS | HMS-S-S-020-CS |
|---|---|---|
| Degree of vacuum pressure Pa(Torr) | 10-6(10-8) | 10-6(10-8) |
| Leak Rate (Pa.m3/sec) | <10-12 | <10-12 |
| Temperature range | 0~80 ℃ | 0~80 ℃ |
| Bearing Type | 6002 | 6005 |
| Housing material | SUS304 | SUS304 |
| Shaft material | SUS630 | SUS630 |
| Cooling | non | water |
| Shaft Diameter | 006 | 010 |
|---|---|---|
| A | 6(+0.018) | 10(+0.022) |
| B | 97.5 | 119.5 |
| C | 57.5 | 69.5 |
| D | M32x1.5 | M38x1.5 |
| E | 0.5Dpx12Lg(Flat | 3Wx1.8Dpx14Lg |
| F | 20 | 25 |
| J | 55 | 60 |
| K | 10 | 10 |
| P | 49 | 55 |
| Model Number | HMS-S-N-006-NS | HMS-S-N-010-NS |
|---|---|---|
| Degree of vacuum pressure Pa(Torr) | 10-6(10-8) | 10-6(10-8) |
| Leak Rate(Pa.m3/sec) | <10-12 | <10-12 |
| Temperature range | 0~80 ℃ | 0~80 ℃ |
| Bearing Type | 627 | 6001 |
| Housing material | SUS304 | SUS304 |
| Shaft material | SUS630 | SUS630 |
| Cooling | non | non |
– Flange Mount Feedthroughs
| Shaft Diameter | 006 | 010 | 012 | 020 |
|---|---|---|---|---|
| A | 6(+0.018) | 10(+0.022) | 12(−0.027) | 20(−0.033) |
| B | 97.5 | 119.5 | 133.5 | 151.5 |
| C | 57.5 | 69.5 | 73.5 | 81.5 |
| D | 38 | 44 | 48 | 63 |
| E | 0.5Dpx12Lg(Flat | 3Wx1.8Dpx14Lg | 4Wx2.5Dpx20Lg | 6Wx3.5Dpx25Lg |
| F | 20 | 25 | 30 | 35 |
| J | 80 | 80 | 90 | 105 |
| K | 10 | 10 | 10 | 10 |
| L | 18 | 24 | 27 | 31 |
| N | PCD60/4-Ø10 | PCD60/4-Ø10 | PCD70/4-Ø10 | PCD85/4-Ø10 |
| Model Number | HMS-S-F-006-NS | HMS-S-F-010-NS | HMS-S-F-012-CS | HMS-S-F-020-CS |
|---|---|---|---|---|
| Degree of vacuum pressure Pa(Torr) | 10-6(10-8) | |||
| Leak Rate (Pa.m3/sec) | <10-12 | |||
| Temperature range | 0~80 ℃ | |||
| Bearing Type | 627 | 6001 | 6002 | 6005 |
| Housing material | SUS304 | |||
| Shaft material | SUS630 | |||
| Cooling | non | water | ||
– Hollow Shaft Feedthroughs
| Shaft Diameter | 010 | 020 | 025 | 030 | 040 | 050 |
|---|---|---|---|---|---|---|
| A | 10(+0.03,+0.01) | 20(+0.03,+0.01) | 25(+0.04,+0.02) | 30(+0.04,+0.02) | 40(+0.04,+0.02) | 50(+0.05,+0.02) |
| B | 78 | 82.5 | 88 | 93 | 96 | 98 |
| C | 64 | 68.5 | 74 | 79 | 80 | 82 |
| D | 58(+0,−0.03) | 63(+0,−0.03) | 73(+0−0.03) | 88(+0,−0.04) | 98(+0,−0.04) | |
| E | 34 | 44 | 49 | 54 | 69 | 79 |
| F | 10 | 10 | 10 | 10 | 12 | 12 |
| ØG | 10(−0.01,−0.03) | 20(−0.01,−0.03) | 25(−0.01,−0.03) | 30(−0.01,−0.03) | 40(−0.01,−0.03) | 50(−0.01,−0.03) |
| ØH | 48(+0.05,+0.03) | 58(+0.06,+0.03) | 63(+0.06,+0.03) | 73(+0.06,+0.03) | 88(+0.07,+0.04) | 50(+0.07,+0.05) |
| Model Number | HMS-H-T-010NS | HMS-H-T-020NS | HMS-H-T-030NS | HMS-H-T-040NS | HMS-H-T-050NS | HMS-H-T-075NS |
|---|---|---|---|---|---|---|
| Degree of vacuum pressure Pa(Torr) | 10-6(10-8) | |||||
| Leak Rate(Pa.m3/sec) | <10-12 | |||||
| Temperature range | 0~80 ℃ | |||||
| Bearing Type | 16003 | 6906 | 6907 | 6908 | 6910 | 6912 |
| Housing material | SUS304 | |||||
| Shaft material | SUS630 | |||||
| Cooling | Non Cooling | |||||
| Shaft Diameter | 010 | 020 | 025 | 030 | 040 | 050 |
|---|---|---|---|---|---|---|
| A | 10(+0.03,+0.01) | 20(+0.03,+0.01) | 25(+0.04,+0.02) | 30(+0.04,+0.02) | 40(+0.04,+0.02) | 50(+0.05,+0.02) |
| B | 78 | 82.5 | 88 | 93 | 96 | 98 |
| C | 64 | 68.5 | 74 | 79 | 80 | 82 |
| D | 51 | 63 | 71 | 78 | 90 | 103 |
| E | 34 | 44 | 49 | 54 | 69 | 79 |
| F | 10 | 10 | 10 | 10 | 12 | 12 |
| ØG | 10(−0.01,−0.03) | 20(−0.01,−0.03) | 25(−0.01,−0.03) | 30(−0.01,−0.03) | 40(−0.01,−0.03) | 50(−0.01,−0.03) |
| J | 90 | 105 | 120 | 120 | 145 | 160 |
| K | 10 | 10 | 10 | 10 | 10 | 12 |
| L | 20 | 22.5 | 26 | 27 | 27 | 26.5 |
| M | PCD70/4-Ø10 | PCD85/4-Ø10 | PCD100/4-Ø10 | PCD100/4-Ø10 | PCD120/4-Ø12 | PCD135/4-Ø12 |
| Model Number | HMS-H-F-010NS | HMS-H-F-020NS | HMS-H-F-025NS | HMS-H-F-030NS | HMS-H-F-040NS | HMS-H-F-050NS |
|---|---|---|---|---|---|---|
| Degree of vacuum pressure Pa(Torr) | 10-6(10-8) | |||||
| Leak Rate(Pa.m3/sec) | <10-12 | |||||
| Temperature range | 0~80 ℃ | |||||
| Bearing Type | 16003 | 6906 | 6907 | 6908 | 6910 | 6912 |
| Housing material | SUS304 | |||||
| Shaft material | SUS630 | |||||
| Cooling | Non Cooling | |||||
자성유체씰(제작실적품)
– Vacuum Robots (Wafer Transfer)
X-TILT Bearing
E-500
Robot Spindle
– OLED
ITO Thin Film Roll to Roll Equipment
OLED Sputter Equip
OLED Passage Roller Guide
– OLED & Ingot Grower
