주식회사 한울이엔지
(주)한울이엔지는 초고진공 시스템 설계 능력과 우수한 제작 기술을 기반으로
국내외 연구소 및 기업체에 관련 서비스를 제공 하고 있습니다.
PRODUCT
반도체 장비 부품류
| Product | OEM P/N | Equip. | Maker | Supply Availability | |
| New | Repair (O/H) | ||||
| 150mm STD Heater | 0010-70252 | Endura | 2nd source | O | O |
| 150mm A101 Heater | 0010-21530 | Endura | 2nd source | O | O |
| 200mm B101 Heater | 0010-13626 | Endura | 2nd source | On Development | O |
| 200mm STD Heater | 0010-70254 | Endura | 2nd source | O | O |
| 200mm A101 Heater | 0010-21246 | Endura | 2nd source | O | O |
| 300mm A101 Heater | 0010-27432 | Endura | 2nd source | On Development | O |
| 300mm E-Chuck Heater | (0010-11343) | Endura | 2nd source | X | O |
- Bellows
Welded Bellows
- Bellows
Formed Bellows
NW / KF (일반)
| 호칭 | 소재 | 두께 | ID (mm) | OD (mm) | 비고 |
|---|---|---|---|---|---|
| NW 16 | 304/316L | 0.15/ 0.2 | 20.1 | 28.5 | |
| 16A | 304/316L | 0.15 | 20.1 | 26.7 | |
| NW25 | 304/316L | 0.15/ 0.2 | 25.1 | 36 | |
| 25A | 304/316L | 0.15 | 25.1 | 33 | |
| NW40 | 304/316L | 0.15/ 0.2 | 38 | 54 | |
| 40A | 304/316L | 0.2 | 37.9 | 49.4 | |
| NW50 | 304/316L | 0.15/ 0.2 | 50.1 | 68 | |
| 50A | 304/316L | 0.2 | 50 | 62.7 | |
| LD | 316Lx2 | 0.2 | 63 | 79 | |
| NW 63 | 304/316L | 0.2 | 65.2 | 85 | |
| 63A | 304 | 0.2 | 65.2 | 81 | |
| 63A | 304 | 0.2 | 65.2 | 80 | |
| NW 80 | 304/316L | 0.2 | 78 | 101 | |
| 80A | 304 | 0.2 | 78 | 96 | |
| 90A | 304 | 0.2 | 90 | 109 | |
| NW 100 | 304/316L | 0.2 | 100 | 127 | |
| NW 125 | 304 | 0.25 | 126.5 | 154.5 | |
| NW 150 | 304 | 0.25 | 150 | 175.5 | |
| NW 200 | 304 | 0.3 | 200.3 | 238 |
2PLY Bellows
| 호칭 | 소재 | 두께 | ID (mm) | OD (mm) | 비고 |
|---|---|---|---|---|---|
| 25A2P | 316Ti | 0.15x2P | 25 | 36 | |
| 40A2P | 316Ti | 0.15x2P | 37.5 | 54 | |
| 50A2P | 316Ti | 0.15x2P | 49.5 | 67 | |
| 63A2P | 316Ti | 0.2x2P | 65 | 86.5 | |
| 80A2P | 316Ti | 0.2x2P | 76 | 100.5 | |
| 100A2P | 316Ti | 0.2x2P | 100.5 | 126 |
Self Leak Detect 벨로우즈
| 호칭 | 소재 | 두께 | ID (mm) | OD (mm) | 비고 |
|---|---|---|---|---|---|
| 25A2P | 316Ti | 0.15x2P | 25 | 36 | |
| 40A2P | 316Ti | 0.15x2P | 37.5 | 54 | |
| 50A2P | 316Ti | 0.15x2P | 49.5 | 67 | |
| 63A2P | 316Ti | 0.2x2P | 65 | 86.5 | |
| 80A2P | 316Ti | 0.2x2P | 76 | 100.5 | |
| 100A2P | 316Ti | 0.2x2P | 100.5 | 126 |
V-BELLOWS
| 호칭 | 소재 | 두께 | ID (mm) | OD (mm) | 비고 |
|---|---|---|---|---|---|
| 15A | 316Ti | 0.127 | 15 | 22 | |
| KF 16 | 316L | 0.1 | 16 | 24.8 | |
| 20A | 316Ti | 0.127 | 19.5 | 29 | |
| 22A | 316L | 0.127 | 22.1 | 33.5 | |
| 25A | HC-22 | 0.1 | 24 | 36 | |
| 25A | 316L | 0.127 | 25.1 | 36.5 | |
| 28A | 316L | 0.127 | 28 | 41.3 | |
| 32A | 316ti | 0.127 | 31.7 | 45.5 | |
| 40A | 316Ti | 0.127 | 37.8 | 55 | |
| 42A | 316L | 0.127 | 42.3 | 56.8 | |
| KF 50 | 316L | 0.127 | 49.8 | 69 | |
| 55A | 316L | 0.15 | 54.7 | 72 | |
| KF 65 | 316L | 0.15 | 60 | 90 | |
| KF 80 | 316L | 0.15 | 78 | 104 | |
| 100A | 316Ti | 0.2 | 94.7 | 120 | |
| KF 100 | 316L | 0.15 | 100 | 132 |
1/2″ , 3/8″ , 1/4″
| 호칭 | 소재 | 두께 | ID (mm) | OD (mm) | 비고 |
|---|---|---|---|---|---|
| 1/4" | SUS316L | 0.15 | 6.2 | 9.5 | |
| 3/8" | SUS316L | 0.15 | 10.2 | 14.5 | |
| 1/2" | SUS316L | 0.15 | 12.5 | 16.7 | |
| 1/4" | Hast C-22 | 0.15 | 5.5 | 8.5 | |
| 3/8" | Hast C-22 | 0.15 | 10.0 | 13.5 | |
| 1/2" | Hast C-22 | 0.15 | 12.0 | 16.0 |
Cylinder Actuator Assy
Assy 101 Wafter Lift
0010-20300
Assy STD Wafer Lift
0010-13441
Assembly Wafter Lift Cooldown
0010-76428
PVD Slit Valve Actuator
0010-76137
Assy, HTHU Motorized Lift
0010-21246
Assy, SHUTTER LINKAGE
0010-21393
Assy, SHUTTER ROTATION LINAGE
0010-01152
Air Cylinder
0010-20480
Assy, CASSETTE Hander Lift
0010-20481
Assy, CASSETTE Hander Lift
0010-20664
Assy, Slit Valve Actuator
0242-36788
Kit Hinge
- Others
SHUTTER ASSY
0010-21578 0020-26973
0520-01017 0020-27668
0010-21393 0020-29614
0050-08618 0021-15587
0020-24775 0010-21336
Chamber, Orient
0010-20252
Orient Rotation
0020-75988
Orient Optima
0040-13135
Chamber, Orient/Degas
0020-22387
8” Hoop
0020-22414
Chuck TC
- On Development
790-022847-003
LAM /Bellows Cylinder
790-073306-009
LAM /Lift Pin Bellows