입자가속기 & 초고진공부품 분야 제품

주식회사 한울이엔지

(주)한울이엔지는 초고진공 시스템 설계 능력과 우수한 제작 기술을 기반으로
국내외 연구소 및 기업체에 관련 서비스를 제공 하고 있습니다.

Prodcut

입자가속기 & 초고진공 부품

Slit System

Wire Monitor

Graphite Filter

Photon Shutter Assy

BM Screen Monitor

Rotary Filter System

In Vacuum Undulator & RF Module Ass’y

In Vacuum Undulator (Vaccum part)

BPM RF Bellows

Photon Absorber

RF Power Coupler

Septum Chamber

Multi pole chamber

Hard X-ray Bendable Mirror Manipulator

[Figure. 1-1]

Hard X-ray Bendable Mirror Manipulator

(outside)

[Figure. 1-2]

Hard X-ray Bendable Mirror Manipulator

(Inside)

Motion	Parameter	Specification
Horizontal Axis (x-axis)	Driver	Horizontal actualor(UHV)
	Range	±20mm
	Resolution	0.02㎛ (motor) / 0.10㎛ (encoder)
	Precision	0.2㎛ (linear encoder)
	Drive type	5P Harmonic Step Moter, PMM3.3A-HG 100, 0.35A
Vertical Axis (z-axis)	Driver	Vertical Actuator
	Range(±)	±25mm
	Resolution	0.05㎛ (motor) / 0.10㎛ (encoder)
	precision	0.2㎛ (linear encoder)
	Drive type	5P Harmonic Step Motor, PK543BW-H100 , 0.75A
Roll	Driver	Vertical Actuator
Roll	Range	±2.60° (±45.45mrad)
*axis distance = 220mm	Resolution	0.094arcsec (0.455μrad) (encoder)
	Precision	0.375arcsec (1.818μrad) (encoder)
	Drive type	5P Harmonic Step Motor, PK543BW-H100 , 0.75A
Pitch	Driver	Vertical Actuator
Pitch	Range	±2.68° (±46.73mrad)
*axis distance = 1070mm	Resolution	0.019arcsec (0.093μrad) (encoder)
	Precision	0.077arcsec (0.374μrad) (encoder)
	Drive type	5P Harmonic Step Motor, PK543BW-H100 , 0.75A
Yaw	Driver	Horizontal actuator(UHV)
Yaw	Range	±2.14° (±37.38mrad)
*axis distance = 1070mm	Resolution	0.008arcsec (0.037μrad) (encoder)
	Precision	0.077arcsec (0.374μrad) (encoder)
	Drive type	5P Harmonic Step Motor, PMM3.3A-HG 100 , 0.35A
Mirror Bender Actustor	Driver	Bender Actuator
	Range	12mm (100kgf)
	Resolution	0.02㎛
	Precision	0.1kgf (by force sensor)
	Drive type	5P Harmonic Step Motor
Base Alignment Sysem	Driver	Manual adjustment (manual adjustment)
	Range	Z direction ±25mm (with roll, pitch)
	Range	x, y, z direction, ±15mm
UHV Alignment System	Range	X & Y : ± 1 deg
UHV Alignment System	Resolution	0.0001 deg
mirror dirnerision (LxWxH) (mm)		1000 x 90 x 55
Effective area (LxW) (mm)		900 x 70
Vacuum chamver dimension (mm)		1630 x 470 x 445
Mirror Center Height(mm)		1400
Cooling method		Water cooling
Vacuum degree(mbar)		less than 2x10E-9 / max 1 10°C baking
Reflective Direcion		Upward
Incidence angle (mrad)&(typical angle)		2
Tangential siope error (μrad)		less than 1.0
Tangential radius (km) & (typical R)		4.294 (2.5 ~ 10.0km,)
Footprin at mirror potition (with)		Max 10mm
Substrate Material & Coating		Si PVRh

Bendable KB Mirror Manipulator

[Figure. 2-1]
Bendable KB Mirror Manipulator
(outside)

[Figure. 2-2]
Bendable KB Mirror Manipulator
(Inside)

[Figure. 2-3] Bendable KB System Coordinate

[Table. 2-1] Bendable KBH System Specifications

Axis(7) / spec.	Moter resolution	Encoder resolution	precision	Range
Pitch axis (UHV Actuator)	≤ 0.05 (0.25 μrad)	≤ 0.1 (0.485 μrad)	≤ 0.2 (0.97 μrad)	≥ ± 1.5 deg.
Roll axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.2 (0.970 μrad)	≤ 0.5 (2.42 μrad)	≥ ± 1.5 deg.
Yaw axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.1 (0.97 μrad)	≤ 0.5 (2.424 μrad)	≥ ± 1.5 deg.
X axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.2 ㎛	≥ ± 10.0 mm
Y axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.2 ㎛	≥ ± 10.0 mm
Z axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.2 ㎛	≥ ± 10.0 mm
Bender axis (UHV Actuator)	≤ 0.05 ㎛	0.1 kgh (Force sensor)	0.2 kgf	≥ 12.0 mm

[Table. 2-2] Bendable KBV System Specifications

Axis(6) / spec.	Moter resolution	Encoder resolution	precision	Range
Pitch axis (UHV Actuator)	≤ 0.05 (0.25 μrad)	≤ 0.1 (0.485 μrad)	≤ 0.2 (0.97 μrad)	≥ ± 1.5 deg.
Roll axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.2 (0.970 μrad)	≤ 0.5 (2.42 μrad)	≥ ± 1.5 deg.
Yaw axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.1 (0.97 μrad)	≤ 0.5 (2.424 μrad)	≥ ± 1.5 deg.
X axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.5 ㎛	≥ ± 10.0 mm
Y axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.5 ㎛	≥ ± 10.0 mm
Bender axis (UHV Actuator)	≤ 0.05 ㎛	0.1 kgh (Force sensor)	0.2 kgf	≥ 12.0 mm

Fixed KB Mirror Manipulator

[Figure. 3-1]
Fixed KB Mirror Manipulator
(outside)

[Figure. 3-2]
Fixed KB Mirror Manipulator
(inside)

[Figure. 3-3]
Fixed KB Mirror Manipulator coordinate

[Table. 3-1] Fixed KBH Mirror Manipulator Specifications

Axis(6) / spec.	Moter resolution	Encoder resolution	precision	Range
Pitch axis (UHV Actuator)	≤ 0.05 (0.25 μrad)	≤ 0.1 (0.485 μrad)	0.2 (0.97 μrad)	≥ ± 1.5 deg.
Roll axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.2 (0.970 μrad)	0.5 (2.42 μrad)	≥ ± 1.5 deg.
Yaw axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.1 (0.97 μrad)	0.5 (2.424 μrad)	≥ ± 1.5 deg.
X axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.2 ㎛	≥ ± 10.0 mm
Y axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.2 ㎛	≥ ± 10.0 mm
Z axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.2 ㎛	≥ ± 10.0 mm

[Table. 3-2] Fixed KBV Mirror Manipulator Specifications

Axis(5) / spec.	Moter resolution	Encoder resolution	precision	Range
Pitch axis (UHV Actuator)	≤ 0.05 (0.25 μrad)	≤ 0.1 (0.485 μrad)	0.2 (0.97 μrad)	≥ ± 1.5 deg.
Roll axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.2 (0.970 μrad)	0.5 (2.42 μrad)	≥ ± 1.5 deg.
Yaw axis (UHV Actuator)	≤ 0.1 (0.485 μrad)	≤ 0.1 (0.97 μrad)	0.5 (2.424 μrad)	≥ ± 1.5 deg.
X axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.5 ㎛	≥ ± 10.0 mm
Y axis (UHV Actuator)	≤ 0.05 ㎛	≤ 0.1 ㎛	0.5 ㎛	≥ ± 10.0 mm

Mirror Manipulator/PGM System (Plane Grating Monochromator)

[Figure. 3-1]
Fixed KB Mirror Manipulator
(outside)

[Figure. 3-2]
Fixed KB Mirror Manipulator
(inside)

[Figure. 3-3]
Fixed KB Mirror Manipulator coordinate

[Table. 4-1] PGM System Grating Motion Specifications

Axis / spec.	Moter resolution	Encoder resolution	precision	Range
Scan motor	≤ 0.02 μrad	≤ 0.03 μrad	0.25 μrad	0.5 ~ 4.0 deg.
Pitch align motor	≤ 0.5 μrad	≤ 0.25 μrad	2.5 μrad	± 1.5 deg.
Roll align motor	≤ 0.4 μrad	≤ 0.25 μrad	2.5 μrad	± 1.5 deg.
Y align motor	≤ 0.02 ㎛	≤ 0.1 ㎛	1.0 ㎛ μ	± 9.0 mm

[Table. 4-2] PGM System Pre-Mirror Motion Specifications

Axis / spec.	Moter resolution	Encoder resolution	precision	Range
Scan motor	≤ 0.02 μrad	≤ 0.03 μrad	0.25 μrad	0.5 ~ 4.0 deg.
Pitch align motor	≤ 0.5 μrad	≤ 0.25 μrad	2.5 μrad	± 1.5 deg.
Roll align motor	≤ 0.4 μrad	≤ 0.25 μrad	2.5 μrad	± 1.5 deg.
Y align motor	≤ 0.05 ㎛	≤ 0.1 ㎛	1.0 ㎛ μ	± 9.0 mm

[Table. 4-3] PGM System Other Motion Specifications

Axis / spec.	Moter resolution	Encoder resolution	precision	Range
X axis motor	≤ 0.1 ㎛	≤ 0.2 ㎛	1.0 ㎛	± 35 mm
Z axis motor	≤ 0.1 ㎛	≤ 0.2 ㎛	1.0 ㎛	± 7.0 mm

SPEM Chamber & Stage & Actuator

◆ Motion Axis

	Motor resolution	Encoder resolution	Precision	Range	Remark
X axis	≤ 0.05 ㎛	≤ 0.1 ㎛	≤ 0.5 ㎛	≥ ± 15.0 mm	UHV Actuator
Y axis	≤ 0.05 ㎛	≤ 0.1 ㎛	≤ 0.5 ㎛	≥ ± 15.0 mm	UHV Actuator
Z axis	≤ 0.05 ㎛	≤ 0.1 ㎛	≤ 0.5 ㎛	≥ ± 15.0 mm	UHV Actuator

In-vacuum actuator

/ARCUS Controller,
3Ch 2ph Step Motor Controller,
3Ch 5ph Step Motor controller

-UHV compatible design

-Ultimate pressure Less than 5×10-10 Torr

-PZT Stage used. (P-561)

-Micro channel plate (Air Cylinder type , Beam By-pass mode)

ELECTRON GUN

[제작 실적품]

4GSR 개념설계 전자총 설계 파라미터

구분	Single bunch mode	Multi-bunch mode
Beam energy	100 keV	100 keV
Charge	0.01~2.5 nC	3~5 nC
Pluse length	≤1 ns	100~400 ns
Repetition rate	2 Hz	2 Hz